Plasma cleaning and activation: Diener Nano
The Plasma clean tool PC controlled Diener Nano performs surface plasma cleaning and surface activation.
- 100 kHz generator
- 2 gas channels (process gases: argon, nitrogen, air)
- Tank volume of 34 L
- Up to 8” (200 mm diameter) wafers.
The tool performs a surface plasma clean to facilitate wire bonding, flip chip assembly, etc. It can modify the surface, such as changing wettability: hydrophilic, hydrophobic.