Plasma cleaning and activation: Diener Nano

Description

The PC-controlled plasma cleaning tool Diener Nano performs surface plasma cleaning and surface activation.

Specifications

100 kHz generator
2 gas channels (process gases: argon, nitrogen, air)
Tank volume of 34 L
Wafers up to 8″ (200 mm) in diameter.

Applications

The tool cleans surfaces by plasma to facilitate wire bonding, flip-chip assembly, etc. It can also modify surface properties, such as wettability (hydrophilic or hydrophobic).