Plasma cleaning and activation: Diener Tetra 30 LF

Plasma cleaning and activation: Diener Tetra 30 LF

Description

The Plasma clean tool Diener Tetra 30 LF performs surface plasma cleaning and surface activation.

Capacities

  • 40 kHz generator
  • 2 gas channels (process gases: argon, nitrogen, air)
  • Tank volume of 34 L
  • Up to 8” (200 mm diameter) wafers.

Applications

The tool performs a surface plasma clean to facilitate wire bonding, flip chip assembly, etc. It can modify the surface, such as changing wettability: hydrophilic, hydrophobic.

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