• Equipment
• Micro-assembly
  Packaging
• Lithography
  Pattern definition
• Analysis
  Characterization

Our equipment

Lithography and Pattern definition

• Heating chamber
• Laminar flow cabinet
• Plasma cleaning and activation: Diener Nano
• Plasma cleaning and activation: Diener Tetra 30 LF
• Profilometer
• Spin coater
• UV illumination and curing spot